Materials Transactions Online

Materials Transactions, Vol.49 No.05 (2008) pp.1186-1191
© 2008 The Japan Institute of Metals

Effects of Mg Additions on Microstructure and Optical Properties of Sol-Gel Derived ZnO Thin Films

Chien-Yie Tsay1, Min-Chi Wang1 and Shin-Chuan Chiang2

1Department of Materials Science and Engineering, Feng Chia University, Taichung, Taiwan 40724, R.O.China
2Taiwan TFT LCD Association (TTLA), Hsinchu, Taiwan 31040, R.O.China

Polycrystalline thin-films of Zn1-xMgxO (0≤ x≤ 0.36) have been prepared by a sol-gel method and a spin-coating technique. In this work, the authors investigate the effects of the Mg addition on crystallization, microstructure and optical properties for ZnO thin films. Mg was incorporated into ZnO thin films that were deposited onto glass substrates by a spin coating technique. The as-deposited films were preheated at 300°C for 10 min and then annealed at 500°C for 1 h. The results show that addition of Mg-species in ZnO films markedly decreased surface roughness, improved transparency in the visible range and increased resistivity. Among the Zn1-xMgxO films investigated in the present study, the Zn0.8Mg0.2O thin film exhibited the best properties, namely single wurzite phase, an optical transmittance of 94.7%, an RMS roughness of 1.63 nm and a resistivity of 8.3× 105 Ω-cm.

(Received 2007/12/21; Accepted 2008/2/26; Published 2008/4/16)

Keywords: ZnO, Zn1-xMgxO thin films, optical properties, sol-gel method

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