Materials Transactions Online

Materials Transactions, Vol.48 No.09 (2007) pp.2534-2538
© 2007 The Japan Institute of Metals

Correlation between sp2/sp3 Ratio or Hydrogen Content and Water Contact Angle in Hydrogenated DLC Film

Shih-Chin Lee1,2, Fong-Cheng Tai1,2 and Che-Hung Wei3

1Department of Materials Science and Engineering, National Cheng-Kung University, Tainan 701, Taiwan
2Center for Micro/Nano Science and Technology, National Cheng-Kung University, Tainan 701, Taiwan
3Department of Mechanical Engineering, Tatung University, Taipei 104, Taiwan

Water contact angle has been measured to indirectly assess the sp2/sp3 ratio and hydrogen content of DLCH film under post N2 annealed treatment with O2 content under 100 ppm. XPS spectrum is used to measure the C1s bonding type and calculate the sp2/sp3 ratio. The surface morphology of DLCH film was examined by SEM and AFM. From experimental results, it seems the surface morphology was not a critical factor on water contact angle value, at least for DLCH film. A quantitative correlation between water contact angle and sp2/sp3 ratio of DLCH film is established from which the hydrogen content can be estimated by the sp2/sp3 ratio as well as Angus equation.

(Received 2007/2/19; Accepted 2007/6/21; Published 2007/8/22)

Keywords: hydrogenated diamond-like carbon (DLCH) film, sp2/sp3 ratio, surface morphology, water contact angle

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