Materials Transactions Online

Materials Transactions, Vol.48 No.09 (2007) pp.2340-2342
© 2007 The Japan Institute of Metals

Fabrication and Characterization of GaP Photonic Crystals for Terahertz Wave Application

Kyosuke Saito, Kei Nozawa, Tadao Tanabe1, Yutaka Oyama1, Ken Suto2, Jun-ichi Nishizawa2, Tetsuo Sasaki2, Tomoyuki Kimura2

1Department of Materials Science, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
2Semiconductor Research Institute, Sendai 980-0845, Japan

We have fabricated GaP two-dimensional photonic crystals (PCs) for terahertz (THz) wave generation by a reactive ion etching in Ar/Cl2 gas chemistries. We performed 75-μm-deep etching of GaP, in which Al2O3 layer is applied as a hard mask with its selectivity as high as 125. We demonstrated the THz-wave generation from the fabricated GaP slab waveguide with the PC structure as a cladding layer under a collinear phase-matched difference frequency generation. In the frequency dependence of THz output power for the PC slab waveguide is seen at around 1.1 THz. From the in-plane transmission spectrum of THz-wave, we confirmed that the THz output characteristics had relation with the photonic structure for THz wave.

(Received 2007/4/24; Accepted 2007/5/21; Published 2007/7/11)

Keywords: Terahertz-wave, GaP, Photonic crystal, optical waveguide, phonon-polariton, collinear phase matching

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