Materials Transactions Online

Materials Transactions, Vol.44 No.9 (2003) pp.1717-1728
© 2003 The Japan Institute of Metals
OVERVIEW

Chemical Vapor Deposition of Iridium, Platinum, Rhodium and Palladium

J. R. Vargas Garcia* and Takashi Goto

Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan

This article reviews the progress in the chemical vapor deposition of iridium, platinum, rhodium and palladium metals. In the course of the last decade the number of articles on CVD of this group of metals has increased significantly. A wide variety of metal organic complexes have been investigated as potential precursors and appreciable results have been obtained. However, some aspects such as low deposition rates and impurity incorporation into the films still remain as concerns in this area. The representative results on CVD of these metals are presented according to the type of metal organic complexes used.

(Received April 22, 2003; Accepted July 22, 2003)

Keywords: chemical vapor deposition, noble metals, platinum group metals, metal organic complex


*Present address: Dept of Metallurgical Eng., ESIQIE-IPN, Mexico 07300, Mexico.

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