The effect of oxygen gas addition on deposition rates, composition and microstructure was investigated in preparing Ir and Pt films by metal-organic chemical vapor deposition using Ir- and Pt-acetylacetonate precursors. Without the addition of oxygen gas, 20 mass% of carbon at most was contained in the films. The carbon was amorphous, surrounding metal particles of several nanometers in diameter. The addition of oxygen gas is effective in obtaining carbon-free Ir and Pt films, and the films grow epitaxially on MgO and sapphire single crystal substrates.
(Received June 8, 1998; In Final Form November 12, 1998)
Keywords: metal-organic chemical vapor deposition, iridium film, platinum film, oxygen gas addition, epitaxial growth
† Graduate Student, Tohoku University, Present address: ESIQIEIPN, AP. 75-874, Mexico.