Analytical transmission electron microscopy which is capable of high-resolution lattice imaging, convergent-beam electron diffraction and elemental spectroscopy is now successively applied in materials science. Two complementary elemental spectroscopy like an energy dispersive X-ray spectroscopy and an electron energy loss spectroscopy are well established for elemental analysis and chemical bonding identification at a high spatial resolution in thin specimens. The present paper reviews the recent developments of the analytical transmission electron microscopy with some current applications in the materials science.
(Received June 9, 1990)
Keywords: analytical transmission electron microscopy, applications in materials science, energy dispersive X-ray spectroscopy, electron energy loss spectroscopy, quantitative analysis, fine structure analysis, mass loss, low temperature
* National Institute for Research in Inorganic Materials, 1, Namiki, Tsukuba 305, Japan.