日本金属学会誌

J. Japan Inst. Met. Mater, Vol. 84, No. 09 (2020),
pp. 304-309

Effects of Atmosphere and Temperature on Microtribology between Silicon Single Crystals

Makoto Takagi1, Kosuke Nagae2, Ryosuke Kiuchi2, Hiroyuki Iwata3 and Hiroyasu Saka4

1Department of Mechanical Engineering, Faculty of Engineering, Aichi Institute of Technology, Toyota 470-0392
2Graduate School of Engineering, Aichi Institute of Technology, Toyota 470-0392
3Department of Electrical and Electronics Engineering, Faculty of Engineering, Aichi Institute of Technology, Toyota 470-0392
4Research Institute for Industrial Technology, Aichi Institute of Technology, Toyota 470-0392

Abstract:

Microtribology of silicon single crystals is one of the key technologies from the viewpoint of reliability of practical application in micro electro mechanical system (MEMS). In the study, a silicon single crystal (100) wafer was scratched by a silicon single crystal tip under a very small loading force in various atmospheres and temperatures, which was characterized using an atomic force microscope. In air and water, the silicon single crystal tips were worn greatly. However, the morphology of the scratched wafer surface was quite different; in air the scratched area of the wafer surface was forming a terrace. In vacuum, the tips were worn slightly. In terms of the effects of temperature, the silicon single crystal softened at 473 K was worn. At 673 K, the silicon single crystal wafer was worn greatly and stick-slip like phenomenon occurred between the silicon single crystals significantly softened. As a result, microtribology is affected by atmospheres or temperatures.

[doi:10.2320/jinstmet.J2020014]


(Received 2020/03/27)

Keywords:

silicon single crystal, microtribology, atomic force microscope, transmission electron microscope


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