日本金属学会誌

J. Japan Inst. Met. Mater, Vol. 77, No. 5 (2013),
pp. 174-176

Preparation of Supersaturated Fe-In Alloy Thin Films by Ion-Plating Process

Mao Amano, Yumiko Ezaki, Kadek Fendy Sutrisna and Yoshihito Matsumura

Department of Applied Science, Graduate School of Engineering, Tokai University, Hiratsuka 259-1292

Abstract:

In this study, Fe-In (Fe-IIIB system) alloys of ferromagnetic thin films with supersaturated indium concentration were prepared by a triode-type ion-plating process with dual vapor sources. The preparation of the supersaturated Fe-In thin films was discussed on the basis of the effects of excess energy on the nanostructure of thin films. The kinetic energy of ions and the ionization rate in evaporation particles were measured using a Langmuir probe and a Faraday cup respectively. The excess energy of IP process increased with increasing applied bias voltage of discharge electrode. In X-ray diffraction analysis, crystal structures of supersaturated film samples were shown to be α-Fe bcc structures of Fe solid solution alloy. The ion-plating process can control the solubility limit and nanostructure of Fe alloy thin films. [doi:10.2320/jinstmet.JBW201210]


(Received 2012/10/17)

Keywords:

excess energy, supersaturated solid solution, thin film, ion-plating


PDF(Free)PDF (Free)     Table of ContentsTable of Contents

Please do not copy without permission.