日本金属学会誌

J. Japan Inst. Metals, Vol. 69, No. 9 (2005),
pp. 815-824

Change in Mechanical Properties of Ion-Irradiated Ceramics Studied by Nanoindentation Method

Shinsuke Nakano1,, Shunsuke Muto1 and Tetsuo Tanabe2,

1Department of Materials, Physics and Energy Engineering, Nagoya University, Nagoya 464-8603
2Department of Energy Engineering and Science, Nagoya University, Nagoya 464-8603

Abstract:

Changes in hardness of several representative ceramics and semiconductors associated with ion irradiation were systematically studied, using a combined method of nanoindentation and finite element analysis. We established a new method for precisely extracting hardness of the embedded damaged layer of ion-irradiated samples. The method was applied to silicon carbide, α-quartz, silica glass and silicon. To semi-quantitatively discuss their mechanical properties changed by irradiation, we introduced a phenomenological model expressed by a set of kinetic equations, and extracted material parameters by fitting the experimental data with the theoretical model. Finally we propose a new atomistic mechanism for plastic deformations of covalent amorphous materials. The present results would give a standard framework to discuss the mechanical property changes of ceramics irradiated with energetic particle.


(Received 2005/5/16)

Keywords:

nanoindentation, finite element method, hardness, SiO2, silicon, silicon carbide, ion irradiation


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