日本金属学会誌

J. Japan Inst. Metals, Vol. 61, No. 6 (1997),
pp. 535-543

Microstructure of Al-Doped Fe-Ta-C Magnetic Thin Films Preparedon Single Crystal Mn-Zn Ferrite Substrate

Fumiyoshi Kirino, Shigekazu Ohotomo and Nagatsugu Koiso

Central Research Laboratory Hitachi, Ltd., Kokubunji-shi, Tokyo 185

Abstract:

The film structure of Al-doped Fe-Ta-C magnetic thin films prepared on a single crystal Mn-Zn ferrite substrate was analyzed by high resolution TEM and an X-ray diffraction method.
The as-deposited Al-doped Fe-Ta-C magnetic thin films prepared after sputtering a Cr layer on a single crystal Mn-Zn ferrite substrate are crystalline. The as-deposited Cr underlayer is crystalline. These as-deposited magnetic thin films show a (100) Fe texture and are found to be composed of fine Fe grains by TEM obserbation. But epitaxal growth of Fe grains is not obserbed near the Cr surface. The magnetic thin film near the Cr surface is composed of microcrystals and these crystal grains are growing to the surface of the magnetic film. By annealing, the crystal orientation does not change. The Fe crystal grain size of the magnetic thin film after annealing is 6{~}10 nm in diameter, and that of TaC is 1{~}2 nm in diameter. A decrease in soft magnetism is due to the (100) Fe texture. The as-deposited magnetic film prepared on a SiO2 underlayer film on the surface of a single crystal Mn-Zn ferrite substrate is in the amorphous state. After annealing, this film shows the (110) Fe texture and exhibits good soft magnetic characteristics. When a crystalline film is prepared on a ferrite substrate, the amorphous underlayer such as SiO2 is useful for controlling a preferred orientation of the film.


(Received December 13, 1996)

Keywords:

ferrite substrate, soft magnetic characteristics, microcrystal, orientation, underlayer film, underlayer, crystal structure


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