日本金属学会誌

J. Japan Inst. Metals, Vol. 59, No. 9 (1995),
pp. 973-977

Local Quantitative SIMS Analysis of Small Amount of Oxygen in Titanium

Hiroyuki T. Takeshita1, Yoichi Tomii2,Ryosuke O. Suzuki1 and Katsutoshi Ono1

1Department of Energy Science and Engineering, Kyoto University, Kyoto
2Department of Materials Science and Engineering, Kyoto University, Kyoto

Abstract:

Local quantitaive analysis of small amounts of oxygen in titanium was studied using the secondary ion mass spectrometry (SIMS). Cs+ ion was used for the primary ion beam, and 16O-, 64TiO- and 96Ti2- for the secondary ones. The intensity profiles of the secondary ions against energy at sputtering (energy profile) showed a good similarity between the cluster ions, i. e., TiO- and Ti2-. The precision of oxygen analysis was improved due to the similar energy profiles of the two analytical ions. Using the high energy resolution of mass spectrometer and the stable extraction voltage of secondary ions, the effect by mismatching in the energy profiles was reduced. The relative standard deviation of the ion intensity ratio I[64TiO-]/I[96TiO2-] was suppressed less than 10% over the oxygen concentration of 23 to 1540 mass ppm.


(Received April 4, 1995)

Keywords:

secondary ion mass spectroscopy, oxygen analysis, titanium, energy profile, cluster ion, quantitative analysis, precision


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