日本金属学会誌

J. Japan Inst. Metals, Vol. 57, No. 1 (1993),
pp. 75-80

Microstructural Changes of SUS304 Stainless Steel Induced by Multi-Energy B+ Implantation

Saburou Ohtani1, Toshinori Takagi1 and Chihiro Yanagi2

1Ion Engineering Research Institute Corp., Hirakata
2Research and Development Department, Kansai Electric Power Co., Inc., Osaka

Abstract:

This study deals with the data on the changes in the microstructure of SUS304 type austenitic stainless steel implanted with B+ ions. We first investigated the multi-energy implantation method to discuss the changes of the microstructure and the characteristics of metals with the implanted atom concentration, and achieved a homogeneous distribution of the implanted atoms. Using this method, SUS304 specimens were implanted with boron ions having energies of 2.89× 109~ 1.74× 1010 J/mol (30~ 180 keV). Then the microstructure of the specimens was analyzed with AES, grazing XRD, and TEM. The results revealed that at a B atomic concentration of about 12% produced by implantation at 3× 1021 B+/m2, there was partial disordering of the lattice, and (Fe, M)2B and (Fe, M)B(M=Cr, Ni) were also observed. After implantation at the 6× 1021 B+/m2, equivalent to about 19 at%B, the amorphous parts had increased although crystals measuring about ten nm also presented. After annealing at 500°C for 1 h, (Fe, M)2B measuring several tens of nm and small amounts of (Fe, M)B could be observed. An X-ray diffraction peak corresponding to the α martensite, which is reported in the austenitic stainless steel implanted with gas ions such as He+ and metal ions like Au+, was observed in the surface of SUS304 specimens implanted with B+ ions, and its height compared to that of γ peak tended to increase in the range of about 19 at%B.


(Received July 27, 1992)

Keywords:

ion implantation boron, boride, austenitic stainless steel, microstructure, amorphous alloy, martensite


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