日本金属学会誌

J. Japan Inst. Metals, Vol. 56, No. 7 (1992),
pp. 863-864

Detection of Electric Charges in SiO2/Si by ESCA

Seiichi Iwata1, Yuzuru Ohji1 and Akitoshi Ishizaka1

1Central Research Laboratory, Hitachi Ltd., Kokubunji

Abstract:


(Received )

Keywords:

electron spectroscopy for chemical analysis, silicon dioxide, X-irradiation, electron traps, hole traps, surface potential, electric charging


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