Yukio Nishikawa1, Kunio Tanaka1 and Yoshikazu Yoshida1
1Production Engineering Laboratory, Matsushita Electric Industrial Co., Ltd., Osaka
The change in morphologies of laser ablated particles by using excimer laser are shown. The KrF excimer laser beam is irradiated on Ni film targets with thicknesses of 0.05-0.33 μm. Then particles are brought off from a target to a substrate. Particles on the substrate are examined by an optical microscope and S. E. M.. The main results obtained are as follows.
(1) The particle morphology depends on the combination of target thickness and laser fluence. It changes from flake, globe, plate to film particles as the laser fluence increases.
(2) The particle morphology depends greatly on the target thickness when the partides are thinner than 0.1 μm. On the other hand, the dependence on the target thickness is small when the particles are thicker than 0.1 μm.
(3) Particles whose diameters are smaller than 0.5 μm decrease with increasing distance between the target and the substrate.
(4) Globe, plate and film particles have a f.c.c. structure with the 0.33 μm thickness target.
ablation, laser sputtering, excimer laser, thin film, metal particles, morphology
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