Materials Transactions Online

Materials Transactions, Vol.53 No.03 (2012) pp.571-574
© 2012 The Japan Institute of Metals

Characteristics of Thin-Film-Transistors Based on Zn-In-Sn-O Thin Films Prepared by Co-Sputtering System

K. J. Chen1, 2, F. Y. Hung2, T. S. Lui2, S. J. Chang3 and T. Y. Liao3

1The Instrument Center, National Cheng Kung University, Tainan 701, Taiwan, R. O. China
2Department of Materials Science and Engineering, Institute of Nanotechnology and Microsystems Engineering, Center for Micro/Nano Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan, R. O. China
3Institute of Microelectronics & Department of Electrical Engineering, National Cheng Kung University, Tainan 701, Taiwan, R. O. China

This study presents the growth of ZITO film by co-sputtering system. By adjusting the chemical composition and electrical properties of ZITO, an amorphous ZITO (a-ZITO) matrix with a semiconducting character was used to apply in active layer for thin-film transistors (TFTs) device. The proposed a-ZITO channel layer with SiNx dielectric layer exhibited depletion mode operation. The device exhibited a subthreshold swing (SS) of 1.65 V/dec, a field-effect mobility (μFE) of 2.57 cm2 V−1 s−1, and an on/off current ratio (Ion/Ioff) of 104. The small SS and an acceptable μFE were associated with a smaller roughness and stable composition of ZITO channel layer.

(Received 2011/11/10; Accepted 2011/12/19; Published 2012/02/25)

Keywords: zinc-indium-tin-oxygen (ZITO), co-sputtering, thin-film transistors (TFTs), depletion mode

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