Materials Transactions, Vol.48 No.03 (2007) pp.635-636
© 2007 The Japan Institute of Metals

Hydrogenation and Dehydrogenation Properties of [AlN-Pd]/Y and [AlOx-Pd]/[AlN-Pd]/Y Films

Yasuhiro Yanagihara, Akira Yamaguchi and Jun-ichi Echigoya

We report hydrogenation and dehydrogenation properties of the [AlN-Pd]/Y and [AlOx-Pd]/[AlN-Pd]/Y films. The [AlN-Pd] and [AlOx-Pd]/[AlN-Pd] composite cap layers were deposited on yttrium layers by a rf-magnetron sputtering method. The cap layers were used to protect the Y layers from oxidation. Electrical resistivity of the films was measured during a few cycles of hydrogen loading and unloading in order to monitor the hydrogenation and dehydrogenation of the Y layers. As repeating the cycles, the amplitude of resistivity change was gradually reduced for the [AlOx-Pd]/[AlN-Pd]/Y film. On the other hand, the [AlOx-Pd]/[AlN-Pd] protective layer showed much better stability against the high temperature steam than the [AlN-Pd] layer.

(Received 2006/11/30; Accepted 2007/1/24; Published 2007/2/25)

Keywords: composite membrane, hydrogen, rare earth, AlN-Pd, AlOx-Pd

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