Materials Transactions Online

Materials Transactions, Vol.46 No.09 (2005) pp.2114-2116
© 2005 The Japan Institute of Metals

High Speed Deposition of Y2O3 Films by Laser-Assisted Chemical Vapor Deposition

Ryan Banal, Teiichi Kimura and Takashi Goto

Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan

Thick yttria (Y2O3) films were synthesized at high speeds by laser-assisted chemical vapor deposition (LCVD) using an Y(dpm)3 (dpm = dipivaloylmethanate) precursor. The effects of deposition conditions on the deposition rate and their microstructure were investigated. While the deposition rate was less than a few microns per hour at low laser powers (PL) less than 100 W, significantly high deposition rates of more than 200 μm/h (56 nm/s) were obtained at PL more than 160 W. The highest deposition rate in this study was 300 μm/h (83 nm/s) being 100 to 1000 times greater than those of conventional CVD processes. Deposited films were dense and isotropic with no preferred orientation showing cauliflower-like microstructure.

(Received 2005/5/17; Accepted 2005/8/9; Published 2005/9/15)

Keywords: laser chemical vapor deposition, deposition rate, Y2O3 film, Y(dpm)3, cauliflower-like microstructure

PDF(Free)PDF (Free) Table of ContentsTable of Contents

REFERENCES

  1. R. N. Sharma, S. T. Lakshmikumar and A. C. Rastogi: Thin Solid Films 199 (1991) 1--8.
  2. N. Imaishi, T. Sato, M. Kimura and Y. Akiyama: J. Cryst. Growth 180 (1997) 680--690.
  3. V. V. Bakovets, T. M. Levashova, V. T. Ratushnyak and L. F. Bakhturova: Inorg. Mater. 38 (2002) 371--373.
  4. Y. Akiyama, T. Sato and I. Nobuyuki: J. Cryst. Growth 147 (1995) 130--146.
  5. S. Shanmugham, M. Hendrick, N. Richards and M. Oljaca: J. Mater. Sci. 39 (2004) 377--381.
  6. T. Kimura and T. Goto: Mater. Trans. 44 (2003) 421--424.
  7. E. Sipp, F. Langlais and R. Naslain: J. Alloys Compd. 186 (1992) 77--87.
  8. K. Brennfleck, E. Fitzer and G. Schoch: Euro CVD Five, Proceedings of the Fifth European Conf. on CVD (1985) 63--70.
  9. M. Pulver, M. Nemetz and G. Wahl: Surf. Coat. Technol. 125 (2000) 400--406.

[JIM HOME] [JOURNAL ARCHIVES]

© 2002 The Japan Institute of Metals
Comments to us : editjt@jim.or.jp